Batch-type supply system and method

Application Number: 00107573
Application Date: 2000.05.19
Publication Number: 1274948
Publication Date: 2000.11.29
Priority Information: 1999/5/20 JP 140478/99
International: B65G49/07;H01L21/00;H01L21/68
Applicant(s) Name: NEC Corp.
Inventor(s) Name: Kondo Ko
Patent Agency Code: 11219
Patent Agent: mu dejun
Abstract A lot supply system includes a plurality of processing units, a supply unit, a plurality of counters, and a supply controller. The processing units output a lot supply request and perform a predetermined process for a lot supplied to them. The supply unit supplies a lot stored in it to requesting processing units in response to the lot supply request from the processing units. The counters count product lots supplied to the units. When counts of the counters reach preset values, the supply controller supplies measurement lots stored in advance to the requesting processing unit and initializes counts of the counters. A lot supply method is also disclosed.