Electric arc ion-plating deposition technology of titanium niobium nitride hard film


Application Number: 00108514
Application Date: 2000.04.28
Publication Number: 1321791
Publication Date: 2001.11.14
Priority Information:
International: C23C14/06;C23C14/32
Applicant(s) Name: Dalian Univ. of Science & Engineering
Address:
Inventor(s) Name: Lin Guoqiang
Patent Agency Code: 21200
Patent Agent: hou mengyuan
Abstract The present invention belongs to the field of metallic material surface modification technology. Said invention technique utilizes the control of arc current of cathode target for electric arc ion plating pure titanium and pure niobium to control components of film to deposit and synthesize nitrated titanium niobium hard film whose hardness is higher than common titanium nitride on the matrix of toolsteel and die steel. It is simple in operation, and easy to control.