Electric arc ion-plating deposition technology of titanium niobium nitride superhard gradient film


Application Number: 00108513
Application Date: 2000.04.28
Publication Number: 1321790
Publication Date: 2001.11.14
Priority Information:
International: C23C14/06;C23C14/32
Applicant(s) Name: Dalian Univ. of Science & Engineering
Address:
Inventor(s) Name: Lin Guoqiang
Patent Agency Code: 21200
Patent Agent: hou mengyuan
Abstract The present invention belongs to the field of metallic material surface modification technology. Said invention is characterized by that it utilizes the regulation of continuous change of arc current of metal cathode target for electric arc ion plating pure titanium and pure niobium with time function to control the components when the film is deposited and grown to different thickness, to synthesize the nitrated titanium niobium superhard gradient film whose cohesion is good and hardness exceeds the peak hardness of general nitrated titanium niobium film. Said invented method is quick in deposition speed, wide in component control range and easy to operate.