Electronic beam irradiating device

Application Number: 00109026
Application Date: 2000.06.01
Publication Number: 1276264
Publication Date: 2000.12.13
Priority Information: 1999/6/7 JP 159266/1999
International: B01J19/08
Applicant(s) Name: Ebara Corp.
Inventor(s) Name: Kajiyama Masaaki
Patent Agency Code: 72002
Patent Agent: huang jianfeng
Abstract The present invention provides an electron beam irradiator that makes it possible to effectively cool a window foil for taking out electrons and window foil installation flanges with a higher cooling efficiency. A window foil for taking out electron beam to the atmosphere side via installation flanges 4 is installed at an end of an accelerating tube 2 or a scanning tube 3 for an electron beam. A passage 13 for a cooling medium is provided by an annular groove formed on the inner circumference of the installation flanges 4 and a lid 11 for closing open ends of an annular groove 10 in each of the installation flanges 4.