Film piezo-electric device


Application Number: 00108912
Application Date: 2000.05.19
Publication Number: 1274954
Publication Date: 2000.11.29
Priority Information: 1999/5/20 JP 139997/1999
International: H01L41/09
Applicant(s) Name: TDk Corp.
Address:
Inventor(s) Name: Yao Yoshihito;Noguchi Takao;Abe Hidetsune
Patent Agency Code: 11038
Patent Agent: wang sibeng
Abstract A thin film piezoelectric device has an epitaxial metal thin film (4) on a silicon substrate (2) and a PZT thin film (5) on the metal thin film, the PZT thin film (5) having a Ti/(Ti+Zr) atomic ratio between 0.65 and 0.90. Therefore, the film bulk acoustic resonator having an extremely broad band is realized.