Gas-conveying quantitative distributing pipe

Application Number: 00108583
Application Date: 2000.05.18
Publication Number: 1274823
Publication Date: 2000.11.29
Priority Information: 1999/5/21 US 60/135,358
International: C23C16/455;G05D7/01;H01L21/205
Applicant(s) Name: Silicon Vally Group Heat System Inc.
Inventor(s) Name: Niten Ingle;D. Neile Stoddard;Yao Zhijie
Patent Agency Code: 11038
Patent Agent: liu zhibeng
Abstract A gas delivery tube is provided. The gas delivery tube includes a plurality of axially aligned nested tubes wherein the innermost tube receives a gas and establishes uniform backing pressure over the length of the innermost tube and an outermost tube provides uniform flow distribution of the gases out through the gas delivery tube.