Low-temperature synthesis of carbon nanometre tube with metal catalytic layer of decomposing carbon source gas

Application Number: 00109211
Application Date: 2000.06.14
Publication Number: 1277147
Publication Date: 2000.12.20
Priority Information: 1999/6/15 KR 22418/1999; 2000/6/2 KR 30353/2000
International: C01B31/02
Applicant(s) Name: Lee Chul-Chim
Inventor(s) Name: Lee Chul-Chim;Ryu Chae-Evn
Patent Agency Code: 72002
Patent Agent: gan ling
Abstract A low-temperature synthesis method of carbon nanotubes using a metal catalyst layer. In the synthesis method, a metal catalyst layer is formed over a substrate. The metal catalyst layer is etched to form isolated nano-sized catalytic metal particles. Then, carbon nanotubes vertically aligned over the substrate are grown from every isolated nano-sized catalytic metal particle through thermal chemical vapor deposition, by decomposing a carbon source gas at a temperature equal to or lower than the strain temperature of the substrate using a carbon source gas decomposing metal catalyst layer.