Maunfacturing method of surface acoustic wave element

Application Number: 00108182
Application Date: 2000.04.28
Publication Number: 1271996
Publication Date: 2000.11.01
Priority Information: 1999/4/28 JP 122507/99
International: H03H3/08
Applicant(s) Name: Murata Manufacturing Co., Ltd.
Inventor(s) Name: Takata Eiichi;Yamamoto Koji;Kometa Toshimaro
Patent Agency Code: 31100
Patent Agent: shen zhaokun
Abstract A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of the interdigital transducer and the piezoelectric body simultaneously so as to reduce the thickness of the interdigital transducer and the piezoelectric body.