Method for cleaning porous body and manufacture the same, non-porous film or keyed lining


Application Number: 00108662
Application Date: 2000.03.24
Publication Number: 1271175
Publication Date: 2000.10.25
Priority Information: 1999/3/26 JP 083599/1999; 1999/3/26 JP 083600/1999
International: B08B3/08;H01L21/02;H01L21/302
Applicant(s) Name: Canon K. K.
Address:
Inventor(s) Name: Yamagata Kenji;Matsuta Aki
Patent Agency Code: 11038
Patent Agent: wang yonggang
Abstract In order to clean a porous body in a short time without causing any change in its structure, the porous body is cleaned after the anodization is completed with a cleaning solution containing at least one of an alcohol and acetic acid.