Method for synthetizing vertical arrangement high-purity carbon nanometre tube in large-scale on large size substrate using hot CVD method


Application Number: 00107805
Application Date: 2000.06.12
Publication Number: 1277145
Publication Date: 2000.12.20
Priority Information: 1999/6/11 KR 21855/99; 1999/6/15 KR 22419/99; 2000/6/2 KR 30352/2000
International: C01B31/02;C23C16/26
Applicant(s) Name: Lee Chul-Chim
Address:
Inventor(s) Name: Lee Chul-Chim;Ryu Chaeevn
Patent Agency Code: 72002
Patent Agent: gan ling
Abstract A method of synthesizing high purity carbon nanotubes vertically aligned over a large size substrate by thermal chemical vapor deposition (CVD). In the synthesis method, isolated nano-sized catalytic metal particles are formed over a substrate by etching, and purified carbon nanotubes are grown vertically aligned, from the catalytic metal particles by thermal CVD using a carbon source gas.