Micro motor-driven mechanical device, liquid spray head and making method thereof

Application Number: 00108781
Application Date: 2000.06.02
Publication Number: 1276294
Publication Date: 2000.12.13
Priority Information: 1999/6/4 JP 158646/1999
International: B41J2/14;B41J2/16
Applicant(s) Name: Canon K. K.
Inventor(s) Name: Osaki Teruo;Yamanaka Akihiro;Imanaka Yoshiyuki
Patent Agency Code: 11038
Patent Agent: wang yonggang
Abstract A micro-electromechanical device comprises a movable member having a fixedly supporting portion and movable portion, and a substrate for having the movable member which is supported in a state having a specific gap with the substrate. For this device, a metallic layer which provides the gap for the movable portion is covered by the fixedly supporting portion of the movable member, and remains to be used as a wiring layer. The wiring layer is electrically connected with a plurality of wiring provided for the substrate. With the structure, thus arranged, the electric resistance is made significantly small. The electrical efficiency is enhanced accordingly. Also, the apparatus that adopts this device is made smaller, and the costs of manufacture thereof is made lower as well.