Organic anti-reflection paint polymer and its preparing method


Application Number: 00107858
Application Date: 2000.06.26
Publication Number: 1290713
Publication Date: 2001.04.11
Priority Information: 1999/6/26 KR 24470/1999
International: C08F220/56;C09D133/26;H01L21/027
Applicant(s) Name: Hyundai Electronics Industries Co., Ltd.
Address:
Inventor(s) Name: Hong Song-Un;Chung Moon-Ho;Peak Gi-Ho
Patent Agency Code: 72002
Patent Agent: gan ling
Abstract The present invention relates to organic anti-reflective coating polymers suitable for use in a semiconductor device during a photolithograhy process for forming ultrafine patterns using 193 nm ArF beam radiation, and preparation method therefor. Anti-reflective coating polymers of the present invention contain a monomer having a pendant phenyl group having high absorbency at the 193 nm wavelength. When the polymers of the present invention are used in an anti-reflective coating in a photolithography process for forming ultrafine patterns, the polymers eliminate the standing waves caused by changes in the thickness of the overlying photosensitive film, by the spectroscopic property of lower layers on wafer and by changes in CD due to diffractive and reflective light originating from the lower layers. Use of the anti-reflective coating of the present invention results in the stable formation of ultrafine patters suitable for semiconductor devices and a great improvement in the production yield. The present invention also relates to anti-reflective compositions containing these polymers, anti-reflective coatings formed from these compositions and semiconductor devices containing these anti-reflective coatings, as well as preparation methods therefor.