Processaable isolation layer grid inlay technology used in sub 0.05 micrometer MOS device

Application Number  00129485 Application Date  2000.12.29
Publication Number  1319884 Publication Date  2001.10.31
Priority Information   2000/1/21 US 09/488806  
Applicant(s) Name  International Business Machine Corp.  
Inventor(s) Name  D.C. Bode;H.I. Hanafei;W.C. Nazils  
Patent Agency Code  72001 Patent Agent  chen ji
AbstractTechniques to fabricate sub-0.05 mum MOSFET devices with Super-Halo doping profile which provide excellent short-channel characteristics are provided. The techniques utilize a damascene-gate process to obtain MOSFET structures with oxide thickness above the source/drain region independent of the gate-oxide thickness and a disposable-spacer technique for the formation of the Super-Halo doping profile.