Tag Archives: non-porous

Method for cleaning porous body and manufacture the same, non-porous film or keyed lining

Application Number: 00108662Application Date: 2000.03.24Publication Number: 1271175Publication Date: 2000.10.25Priority Information: 1999/3/26 JP 083599/1999; 1999/3/26 JP 083600/1999International: B08B3/08;H01L21/02;H01L21/302Applicant(s) Name: Canon K. K.Address: Inventor(s) Name: Yamagata Kenji;Matsuta AkiPatent Agency Code: 11038Patent Agent: wang yonggangAbstract In order to clean a porous body in a short time without causing any change in its structure, the porous body is cleaned… Read More »