Tag Archives: penetrance

Optimized penetrance injection for simutaneously forming silicon-metal compacitor

Application Number  00128775 Application Date  2000.09.20 Publication Number  1289142 Publication Date  2001.03.28 Priority Information   1999/9/21 US 09/400676   International Classification  H01L21/265;H01L21/324;H01L29/78   Applicant(s) Name  International Business Machines Inc.   Address     Inventor(s) Name  D.D. Kerbao;D.L. Harami   Patent Agency Code  72001 Patent Agent  lu xinhua AbstractA method of forming a diffusion region in… Read More »