Tag Archives: Phase-shifting

Phase-shifting filter for projecting etching imaging

Application Number: 00116190Application Date: 2000.10.20Publication Number: 1350193Publication Date: 2002.05.22Priority Information: International: G02B27/46Applicant(s) Name: Inst. of Photoelectronic Techn, Chinese Academy of SciencesAddress: Inventor(s) Name: Chen Xunan;Luo Xiangang;Yao HanminPatent Agency Code: 51200Patent Agent: zhang yigongAbstract The present invention relates to a projection photo-etching image phase-shifting filter equipment, consisting of light source, condenser group, imaging objective and silicon… Read More »