Tag Archives: thermopile

Film thermopile with new structure

Application Number: 00116552Application Date: 2000.06.16Publication Number: 1274953Publication Date: 2000.11.29Priority Information: International: G01K7/02;H01L35/00Applicant(s) Name: Shanghai Inst. of Metallurgy, Chinese Academy of SciencesAddress: Inventor(s) Name: Shen Dexin;Lu JianguoPatent Agency Code: 31002Patent Agent: ji liangjiuAbstract The film thermopile of the present invention is manufactured by means of semiconductor IC process and micro machine building process. On silicon chip… Read More »