Capacitive pressure transducer


Application Number  00128193 Application Date  2000.09.30
Publication Number  1297144 Publication Date  2001.05.30
Priority Information   1999/10/6 JP 285234/1999  
International
Classification
 G01L9/12  
Applicant(s) Name  K.K. Yamatake  
Address    
Inventor(s) Name  Ishikura Yoshiyuki;Kimura Shigeo;Masuda Homare  
Patent Agency Code  11038 Patent Agent  wang sibeng
AbstractA capacitive pressure sensor includes lower and upper wafers, a stationary electrode, first and second pads, a movable electrode, and a plurality of extraction electrodes. The lower wafer has a first capacitor forming portion and a first pad forming portion communicating with it. The upper wafer has a second capacitor forming portion, constituting a capacitor chamber together with the first capacitor forming portion, and a second pad forming portion communicating with it. The stationary electrode is formed on a bottom surface of the first capacitor forming portion. The first pad is formed on a bottom surface of the first pad forming portion and connected to the stationary electrode through a first interconnection. The movable electrode is formed on a bottom surface of the second capacitor forming portion to oppose the stationary electrode. The second pad is formed in the second pad forming portion and connected to the movable electrode through a second interconnection. The extraction electrodes are connected to the fist and second pads and extracted outside through holes in the lower wafer. The lower and upper wafers are bonded to each other such that their pad forming portions are covered with their bonding surfaces.