Application Number: 00102820
Application Date: 2000.03.10
Publication Number: 1313374
Publication Date: 2001.09.19
Priority Information:
International: C09K3/14
Applicant(s) Name: Changxing Chemical Industry Co Ltd
Address:
Inventor(s) Name: Cai Mingxiong
Patent Agency Code: 72002
Patent Agent: gan ling
Abstract A grinding slurry sued for semiconductor and IC manufacture to grind the insulating dielectric layer contains cerium oxide, aluminium hydroxide, cerium salt, water and optional acidic substance for making its pH value less than 5.