Polymerizable alkylene compounds containing tetrahydrofuran methyloxycarbonyl radical and potoresist containing it

Application Number: 00107802
Application Date: 2000.06.12
Publication Number: 1328272
Publication Date: 2001.12.26
Priority Information:
International: G03F7/031
Applicant(s) Name: Changxing Chemical Industry Co Ltd
Inventor(s) Name: Yu Qingren;Bo;Shiyao;Xie Yucai
Patent Agency Code: 11127
Patent Agent: liu chaohua
Abstract A polymerizable olefine compound containing tetrahydrofuran methyloxycarbonyl radical and the photoresist agent containing the compound are disclosed. Said compound can react on other compound to become resin, which can be used as the main component of radiation-sensitive photoresist. Said compound can improve the adhesion of resin on substrate, and intensify the resistance of resin to etching for high resolution and contrast, and can be developed in alkaline aqueous solution.