Tag Archives: deionized

Temp.-controlled degasification of deionized water in extremely ultrasonic cleaned semiconductor chip

Application Number: 00108988Application Date: 2000.05.25Publication Number: 1276271Publication Date: 2000.12.13Priority Information: 1999/5/25 US 09/318156International: B08B3/10;B08B3/12;B08B7/04;C02F1/00;C23G1/00;H01L21/304;H01L21/306Applicant(s) Name: Infineon Technology North America Corp.Address: Inventor(s) Name: S. Kudlcar;D. LasPatent Agency Code: 72001Patent Agent: liang yongAbstract A system is provided to prepare deionized water having a 100% saturated concentration of a gas, e.g., nitrogen, at a hot temperature, e.g., 50-85… Read More »