Tag Archives: Gas-conveying

Gas-conveying quantitative distributing pipe

Application Number: 00108583Application Date: 2000.05.18Publication Number: 1274823Publication Date: 2000.11.29Priority Information: 1999/5/21 US 60/135,358International: C23C16/455;G05D7/01;H01L21/205Applicant(s) Name: Silicon Vally Group Heat System Inc.Address: Inventor(s) Name: Niten Ingle;D. Neile Stoddard;Yao ZhijiePatent Agency Code: 11038Patent Agent: liu zhibengAbstract A gas delivery tube is provided. The gas delivery tube includes a plurality of axially aligned nested tubes wherein the innermost… Read More »