Application Number 00129493 Application Date 2000.12.29 Publication Number 1304169 Publication Date 2001.07.18 Priority Information 2000/1/10 US 09/480033 International Classification H01L21/20;H01L21/328 Applicant(s) Name International Business Machine Corp. Address Inventor(s) Name Huang Fengyi Patent Agency Code 72001 Patent Agent chen ji AbstractA process for forming a silicon-germanium base of a Read more