Tag Archives: megnetron

Manufacture of cladded hollow megnetron sputtering target

Application Number: 00109853Application Date: 2000.07.10Publication Number: 1308146Publication Date: 2001.08.15Priority Information: 1999/8/3 US 09/368062International: C23C14/35;H01J9/02;H01J23/05Applicant(s) Name: Polex Ea ST Tech. Inc.Address: Inventor(s) Name: Shaileshi Kurcani;Tony Sica;Remond K.F. RamoPatent Agency Code: 72002Patent Agent: liu xinpengAbstract A method is provided for forming clad hollow cathode magnetron sputter targets that are lighter in weight and/or less expensive than monolithic… Read More »