Tag Archives: non-uniform

Process for repairing environment with non-uniform rotary electric field

Application Number: 00109498Application Date: 2000.07.07Publication Number: 1276347Publication Date: 2000.12.13Priority Information: International: C02F1/48;C02F11/00Applicant(s) Name: Qinghua Univ.Address: Inventor(s) Name: Zhang Xihui;Wang Hui;Luo QishiPatent Agency Code: 11201Patent Agent: luo wenqunAbstract A process for improving environment with non-uniform rotary electric field is disclosed. The column electrodes are arranged in the polluted field in polygonal mode. A voltage is applied… Read More »

Method and equipment for reducing non-uniform area influence in semiconductor device production

Application Number: 00108237Application Date: 2000.04.30Publication Number: 1280384Publication Date: 2001.01.17Priority Information: 1999/4/30 US 09/302392International: G03F7/00;H01L21/027Applicant(s) Name: Infineon Tech. North America Corp.Address: Inventor(s) Name: S.Schlze;F.ZhakPatent Agency Code: 72001Patent Agent: liang yongAbstract The non-uniformity edge effect that can affect the quality of chips near the edge of a semiconductor wafer of various steps in the manufacture of integrated… Read More »